LIGHT-ABSORBING LAYER SYSTEM, THE PRODUCTION THEREOF AND SPUTTER TARGET SUITABLE THEREFOR

摘要

A light-absorbing layer system comprising at least two layers is specified, one layer of which is an anti-reflection layer facing the observer which is made of a dielectric material and at least one further layer of which is an absorber layer facing away from the observer made of an oxide or an oxynitride with an hypostoichiometric oxygen content. The layer system has a total visible transmission Tv in the wavelength range from 380 to 780 nm of less than 20%, a visible reflection Rv of less than 6% and has a layer resistance Rϒ of more than 10 k Ohm.