发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide stabilized electrical characteristics with a transistor using an oxide semiconductor layer, and provide a semiconductor device with high reliability having the transistor.SOLUTION: A semiconductor device comprises: a multilayer film containing an oxide layer and an oxide semiconductor layer; a gate insulation film provided in contact with the multilayer film; and a gate electrode overlaid on the multilayer film via the gate insulation film. The oxide semiconductor layer contains indium, and is provided in contact with the oxide layer. The oxide layer has an energy gap being higher than that of the oxide semiconductor layer, and contains indium.
申请公布号 JP2014078706(A) 申请公布日期 2014.05.01
申请号 JP20130194755 申请日期 2013.09.20
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI
分类号 H01L29/786;G09F9/30;H01L21/8234;H01L27/06;H01L27/088 主分类号 H01L29/786
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