MANUFACTURING METHOD OF OPTICAL INTERCONNECT DEVICE AND OPTICAL INTERCONNECT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical interconnect device capable of appropriately performing optical path conversion or optical coupling according to a core section dimension of an optical waveguide.SOLUTION: A manufacturing method of an optical interconnect device includes: forming a counter bore part in a predetermined portion of a resin layer formed on a substrate; placing a foamable resin inside the counter bore part with the substrate tilted in a first direction; foaming and curing the foamable resin under a reduced pressure atmosphere while maintaining the tilt of the substrate; turning the pressure back to a normal pressure after the foaming and the curing and deforming a surface of the foamable resin making contact with the atmosphere to a concave face; forming a reflection film on the concave surface; and forming a micromirror having a concave-shaped reflection surface tilting to the substrate.