| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a thermal type flow-meter capable of determining the presence or absence of the abnormality of a sensor element, while detecting the flow rate of fluid and a method for determining abnormality thereof.SOLUTION: A thermal type flow-meter 101 includes: a sensor element 10; an output circuit 11, a storage part 20; and an abnormality determination part 22. The sensor element 10 includes an upstream side thermopile 1; a heater 2; and a downstream side thermopile 3. The output circuit 11 outputs a signal representing a flow rate of fluid based on a difference voltage between the output voltage Vu of the upstream side thermopile 1 and the output voltage Vd of the downstream side thermopile 3. The storage part 20 previously stores a standard relationship for determining the standard of the relationship between the voltages Vu, Vd. The abnormality determination part 22 compares the relationship between the voltage Vu output from the upstream side thermopile 1 and the voltage Vd output from the downstream side thermopile 3 with the standard relationship and determines the presence or absence of the abnormality related to the upstream side thermopile 1 and the downstream side thermopile 3.</p> |
