发明名称 |
CMP PAD CONDITIONERS WITH MOSAIC ABRASIVE SEGMENTS AND ASSOCIATED METHODS |
摘要 |
A CMP pad conditioner comprises a plurality of abrasive segments. Each abrasive segment includes a segment blank and an abrasive layer attached to the segment blank, the abrasive layer including a superhard abrasive material. A pad conditioner substrate is also provided. Each of the plurality of abrasive segments is permanently affixed to the pad conditioner substrate in an orientation that enables removal of material from a CMP pad by the abrasive layer as the pad conditioner and the CMP pad are moved relative to one another. |
申请公布号 |
US2014120807(A1) |
申请公布日期 |
2014.05.01 |
申请号 |
US201313846740 |
申请日期 |
2013.03.18 |
申请人 |
SUNG CHIEN-MIN;SUNG MICHAEL |
发明人 |
SUNG CHIEN-MIN;SUNG MICHAEL |
分类号 |
B24B53/017 |
主分类号 |
B24B53/017 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|