发明名称 METHOD OF FABRICATING A SELF-ALIGNING DAMASCENE MEMORY STRUCTURE
摘要 A method of forming a memory cell is provided. The method includes forming a first pillar-shaped element that includes a first semiconductor material, forming a first opening self-aligned with the first pillar-shaped element, and depositing a second semiconductor material in the first opening to form a second pillar-shaped element above the first pillar-shaped element. Other aspects are also provided.
申请公布号 US2014117514(A1) 申请公布日期 2014.05.01
申请号 US201314140468 申请日期 2013.12.24
申请人 SANDISK 3D LLC 发明人 HSIA KANG-JAY;LI CALVIN K.;PETTI CHRISTOPHER JOHN
分类号 H01L29/66;H01L29/868 主分类号 H01L29/66
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