COMPOSITE DILATION MODE RESONATORS

摘要

This disclosure provides systems, methods and apparatus related to acoustic resonators that include composite transduction layers (116, 118) for enabling selective tuning of one or more acoustic or electromechanical properties. In one aspect, a resonator structure includes one or more first electrodes (142), one or more second electrodes (144), and a transduction layer (116, 118) arranged between the first and second electrodes. The transduction layer includes a plurality of constituent layers. In some implementations, the constituent layers include one or more first piezoelectric layers and one or more second piezoelectric layers. The transduction layer is configured to, responsive to signals provided to the first and second electrodes, provide at least a first mode of vibration of the transduction layer with a displacement component along the z axis and at least a second mode of vibration of the transduction layer with a displacement component _ along the plane of the x axis and the y axis.