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发明名称
气体喷射单元及使用该气体喷射单元沈积薄层之装置及方法
摘要
申请公布号
TWI435948
申请公布日期
2014.05.01
申请号
TW099121509
申请日期
2010.06.30
申请人
细美事有限公司 南韩
发明人
朴炯洙
分类号
C23C16/455
主分类号
C23C16/455
代理机构
代理人
张耀晖 台北市大安区敦化南路2段71号18楼;庄志强 台北市大安区敦化南路2段71号18楼
主权项
地址
南韩
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