发明名称 GROWING GRAPHENE ON SUBSTRATES
摘要 Embodiments described herein provide methods and apparatus for forming graphitic carbon such as graphene on a substrate. The method includes providing a precursor comprising a linear conjugated hydrocarbon, depositing a hydrocarbon layer from the precursor on the substrate, and forming graphene from the hydrocarbon layer by applying energy to the substrate. The precursor may include template molecules such as polynuclear aromatics, and may be deposited on the substrate by spinning on, by spraying, by flowing, by dipping, or by condensing. The energy may be applied as radiant energy, thermal energy, or plasma energy.
申请公布号 WO2014066574(A1) 申请公布日期 2014.05.01
申请号 WO2013US66501 申请日期 2013.10.24
申请人 APPLIED MATERIALS, INC. 发明人 BEASLEY, CARA;HOFMANN, RALF;FOAD, MAJEED A.
分类号 H01L21/20;H01L21/205 主分类号 H01L21/20
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