发明名称 SEMICONDUCTOR SWITCH DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR SWITCH DEVICE
摘要 A semiconductor switch device having an improved distortion characteristic and a method of manufacturing the semiconductor switch device are provided. The semiconductor switch device (1) includes semiconductor elements (E1, D1) formed on a single semiconductor substrate (2) with the provision of recesses (3A, 3B) for the semiconductor elements. The semiconductor element (D1) constitutes a switch circuit. The semiconductor elements (E1, D1) constitute a logic circuit. The semiconductor elements (E1, D1) include respectively gate electrodes (4A, 4B), drain electrodes (6A, 6B), and source electrodes (5A, 5B). The gate electrode (4B) has a rectangular external shape in section. The gate electrode (4A) has a V-like external shape in section.
申请公布号 EP2434538(A4) 申请公布日期 2014.04.30
申请号 EP20100777701 申请日期 2010.05.14
申请人 MURATA MANUFACTURING CO., LTD. 发明人 SAIMEI TSUNEKAZU;KOBAYASHI KAZUYA;HIMEDA KOSHI;OKUDA NOBUYOSHI
分类号 H01L21/338;H01L21/8232;H01L27/06;H01L27/095;H01L29/20;H01L29/423;H01L29/812 主分类号 H01L21/338
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