摘要 |
<p>A method for manufacturing a semiconductor light-emitting device of the invention includes: forming a semiconductor layer (11,12) including a light-emitting layer and a first interconnect layer (13,14,16,21,22,25) on a major surface of a temporary substrate (1); dividing the semiconductor layer (11,12) and the first interconnect layer (13,14,16,21,22,25) into a plurality of chips (10) by a trench (26); collectively bonding each divided portion of the first interconnect layer (13,14,16,21,22,25) of a plurality of chips (10a) to be bonded not adjacent to each other out of the plurality of chips (10) on the temporary substrate (1) to a second interconnect layer (32,33,35) while opposing the major surface of the temporary substrate (1) and the major surface of a supporting substrate (31) forming the second interconnect layer (32,33,35), and collectively transferring a plurality of the bonded chips (10a) from the temporary substrate (1) to the supporting substrate (31) after irradiating interfaces between the bonded chips (10a) and the temporary substrate (1) and separating the chips (10a) and the temporary substrate (1) from each other.
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