发明名称 Method for manufacturing semiconductor light-emitting device and semiconductor light emitting device
摘要 <p>A method for manufacturing a semiconductor light-emitting device of the invention includes: forming a semiconductor layer (11,12) including a light-emitting layer and a first interconnect layer (13,14,16,21,22,25) on a major surface of a temporary substrate (1); dividing the semiconductor layer (11,12) and the first interconnect layer (13,14,16,21,22,25) into a plurality of chips (10) by a trench (26); collectively bonding each divided portion of the first interconnect layer (13,14,16,21,22,25) of a plurality of chips (10a) to be bonded not adjacent to each other out of the plurality of chips (10) on the temporary substrate (1) to a second interconnect layer (32,33,35) while opposing the major surface of the temporary substrate (1) and the major surface of a supporting substrate (31) forming the second interconnect layer (32,33,35), and collectively transferring a plurality of the bonded chips (10a) from the temporary substrate (1) to the supporting substrate (31) after irradiating interfaces between the bonded chips (10a) and the temporary substrate (1) and separating the chips (10a) and the temporary substrate (1) from each other. </p>
申请公布号 EP2302703(A3) 申请公布日期 2014.04.30
申请号 EP20100154638 申请日期 2010.02.25
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SUGIZAKI, YOSHIAKI;KOJIMA, AKIHIRO;ANDO, MASANOBU;FURUKAWA, KAZUYOSHI
分类号 H01L33/00;H01L33/38;H01L33/62 主分类号 H01L33/00
代理机构 代理人
主权项
地址