METHOD FOR OPENING DIELECTRIC FILM OF PERL TYPE SOLAR CELL

摘要

The present invention relates to a method for opening a dielectric film of a PERL type solar cell capable of expanding an opening width of the dielectric film by laser without the change of a nozzle. To this end, the method for opening the dielectric film of the PERL type solar cell which eliminates and opens a part of the dielectric film formed on the rear side of a silicon substrate through a laser process comprises a step of preparing the silicon substrate with the dielectric film formed on the rear side; a step of irradiating the dielectric film with a laser beam outputted from a laser beam light source through a nozzle and irradiating a portion which gets out of center of the nozzle with the laser beam; and a step of moving the silicon substrate in one direction at a certain speed and eliminating and opening a part of the dielectric film. Therefore, the present invention can expand the opening width of the dielectric film which is opened by the laser without the change of the nozzle and can eliminate the dielectric film while minimizing an effect on the silicon substrate. [Reference numerals] (AA) Arrangement position; (BB) Shape; (CC) Line width (8um); (DD) About 40um; (EE) About 65um; (FF) About 80um