| 摘要 |
<p>THE PRESENT INVENTION PROVIDES A METHOD TO PATTERN A SUBSTRATE WHICH FEATURES CREATING A MULTI-LAYERED STRUCTURE BY FORMING, ON THE SUBSTRATE, A PATTERNED LAYER HAVING PROTRUSIONS AND RECESSIONS. FORMED UPON THE PATTERNED LAYER IS A CONFORMAL LAYER, WITH THE MULTI-LAYERED STRUCTURE HAVING A CROWN SURFACE FACING AWAY FROM THE SUBSTRATE. PORTIONS OF THE MULTI-LAYERED STRUCTURE ARE REMOVED TO EXPOSE REGIONS OF THE SUBSTRATE IN SUPERIMPOSITION WITH THE PROTRUSIONS, WHILE FORMING A HARD MASK IN AREAS OF THE CROWN SURFACE IN SUPERIMPOSITION WITH THE RECESSIONS.</p> |
