| 摘要 |
<p>A MICRO-FLUIDIC ACTUATOR (20) IS DISCLOSED FOR REGULATING FLUID FLOW IN A MICROSCOPIC LEVEL. THE ACTUATOR COMPRISES A DIAPHRAGM MATERIAL (21); AND AN ELECTROSTATIC ACTUATING UNIT (22) IN THE FORM OF MULTI-FINGER CANTILEVERS THAT DISPLACES THE DIAPHRAGM MATERIAL WHEN ACTUATED. THE DIAPHRAGM MATERIAL (21) IS POLYMER BASED MATERIAL. A METHOD OF FABRICATING THE ACTUATOR IS DESCRIBED. A MICRO-FLUIDIC SYSTEM IS ALSO DESCRIBED. THE MICRO-ACTUATOR CAN BE A BASIS TO FORM A MICRO-VALVE, MICRO-PUMP OR MICRO-DISPENSER.</p> |
