| 摘要 |
A pressure sensor, particularly an absolute pressure sensor, and methods for manufacturing the pressure sensor are described with the sensor having a deformable membrane (21) providing a separation between a cavity, which for an absolute pressure measurement is kept at an essentially constant pressure, and a port open to the outside of the sensor, with the cavity having a measuring chamber with an associated sensing device to transfer the response of the deformable membrane (21) to the pressure at the port into a signal capable of being processed by a processing circuit being mounted onto a substrate (10) with the sensor being formed essentially from a stack of at least three layers with a first layer (1) including the substrate and the processing circuit, the second layer(2) the membrane and the third layer (3) being a thick protective layer adapted for use as a handling layer and having the port through it. |
