发明名称 |
Numerical aperture (na) controlling unit, variable optical probe including the na controlling unit, and depth scanning method using the na controlling unit |
摘要 |
A numerical aperture (NA) controlling unit and a variable optical probe including the same are provided. The NA controlling unit includes: an aperture adjustment unit which controls an aperture through which light is transmitted; and a focus control unit that is disposed in a predetermined position with respect to the aperture adjustment unit, that focuses light transmitted through the aperture, and that has an adjustable focal length. The variable optical probe includes: a light transmission unit; a collimator that collimates light transmitted through the light transmission unit into parallel light; an NA controlling unit that focuses light on a sample to be inspected; and a scanner that varies a path of light transmitted through the light transmission unit such that a predetermined region of the sample is scanned by light that passes through the NA controlling unit. |
申请公布号 |
EP2570075(A3) |
申请公布日期 |
2014.04.30 |
申请号 |
EP20120184541 |
申请日期 |
2012.09.14 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
CHOI, MIN-SEOG;LEE, SEUNG-WAN;KIM, WOON-BAE;LEE, EUN-SUNG;JUNG, KYU-DONG;CHANG, JONG-HYEON |
分类号 |
A61B5/00;G01B9/02;G01B11/22;G01N21/17;G02B3/14;G02B5/00;G02B7/04;G02B21/00;G02B26/00;G02B26/02;G02B26/08;G02B26/10;G03B9/00 |
主分类号 |
A61B5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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