发明名称 LAMINATE APPARATUS
摘要 Disclosed is a laminate apparatus. The laminate apparatus includes: a first space part which can control pressure, a second space part which is separated from the first space part by a diagram and can control pressure, a panel part which is installed in the second space part and is formed between the diagram and an object to be laminated, a heater mounting part which is formed in the panel, a heater part which is inserted into the heater mounting part, a heat exchanging part which is formed in the panel part and is connected to a plurality of heater mounting parts. [Reference numerals] (48) Thermal medium storage part; (48C) Temperature control part; (90) Control part
申请公布号 KR101385533(B1) 申请公布日期 2014.04.30
申请号 KR20130110415 申请日期 2013.09.13
申请人 ZEUS CO., LTD. 发明人 MUN, SUNG IL;KIM, SUNG HOON;IM, CHANG HYUCK;YOO, CHOON WOO;LEE, BYEONG SU
分类号 H01L31/042;B32B37/00 主分类号 H01L31/042
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