| 摘要 |
The MEMS fixed capacitor (1) comprises a bottom metal electrode (3) formed onto a substrate (S), a top metal electrode (2) supported by metal pillars (5) above the bottom metal electrode, and a gas-containing gap (4) forming a non-solid dielectric layer between said top (2) and bottom (3) metal electrodes ; the distance (D) between the top (2) and bottom (3) metal electrodes is not more than 1µm and the thickness (E) of the top metal electrode (2) is not less than 1µm. |
