MEASUREMENT METHOD OF MICROROUGHNESS AND MEASUREMENT APPARATUS USING THEREOF

摘要

The present invention relates to a method for measuring a micro-roughness. The method can measure an accurate micro-roughness by removing noise. The method for measuring a micro-roughness according to an embodiment of the present invention uses a measuring device that can obtain a topography image of a measured object through a scan relative to the measured object. The method comprises: a zero scanning step of obtaining a topography image without a scan relative to a measured object by setting the measuring device in order to obtain the topography image on the surface of the measured object; an image scanning step of obtaining a topography image of a part to be measured for a micro-roughness on the measured object; a zero scanning PSD step of obtaining power spectrum density data of the topography image obtained in the zero scanning step; an image scanning PSD step of obtaining power spectrum density data of the topography image obtained in the image scanning step; a correcting step of correcting the power spectrum density data obtained in the image scanning PSD step by using the power spectrum density data obtained in the zero scanning PSD step; and a calculating step of calculating a micro-roughness on the surface of the measured object by using the power spectrum density data obtained in the image scan PSD step and corrected in the correcting step. [Reference numerals] (S10) Zero scanning step; (S20) Image scanning step; (S30) Zero scanning PSD step; (S40) Image scanning PSD step; (S50) Correcting step; (S60) Micro-roughness calculating step