发明名称 Probe card holding apparatus with probe card engagement structure
摘要 A probe card holding apparatus is provided and may be configured to hold a probe card in a test head. The probe card may include a clamp head formed at a center part of a back surface of the probe card, and a holding device provided at the test head and configured to engage with the clamp head.
申请公布号 US8710855(B2) 申请公布日期 2014.04.29
申请号 US201113195427 申请日期 2011.08.01
申请人 NAMIKI KATSUHIKO;NAITO SHIGEAKI;ADVANTEST CORPORATION 发明人 NAMIKI KATSUHIKO;NAITO SHIGEAKI
分类号 G01R31/00 主分类号 G01R31/00
代理机构 代理人
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