发明名称 |
Solid-state image pickup element, method of manufacturing the same, and image pickup apparatus including the same |
摘要 |
An embodiment of the invention provides a solid-state image pickup element, including: a semiconductor layer having a photodiode, photoelectric conversion being carried out in the photodiode; a silicon oxide film formed on the semiconductor layer in a region having at least the photodiode by using plasma; and a film formed on the silicon oxide film and having negative fixed charges. |
申请公布号 |
US8709958(B2) |
申请公布日期 |
2014.04.29 |
申请号 |
US201213493454 |
申请日期 |
2012.06.11 |
申请人 |
OSHIYAMA ITARU;HIYAMA SUSUMU;SONY CORPORATION |
发明人 |
OSHIYAMA ITARU;HIYAMA SUSUMU |
分类号 |
H01L21/30;H01L21/316;H01L27/14;H01L31/0232;H04N5/335;H04N5/361;H04N5/369;H04N5/374 |
主分类号 |
H01L21/30 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|