发明名称 |
Actuator, actuator structure and method of manufacturing actuator |
摘要 |
An actuator includes: a diaphragm having a thickness equal to or greater than 0.5μm and equal to or less than 20μm; a piezoelectric body layer which is provided on a first surface side of the diaphragm, and receives stress from the diaphragm; a pair of electrodes which is provided on the first surface side of the diaphragm together with the piezoelectric body layer, and is mutually opposing via the piezoelectric body layer; and a stress adjusting layer which is provided on a second surface side of the diaphragm on an opposite side to the first surface of the diaphragm, and receives stress from the diaphragm in a same direction as the stress that the piezoelectric body layer receives from the diaphragm. |
申请公布号 |
US8710716(B2) |
申请公布日期 |
2014.04.29 |
申请号 |
US201113032181 |
申请日期 |
2011.02.22 |
申请人 |
FUJII TAKAMICHI;HIRABAYASHI YASUTOSHI;FUJIFILM CORPORATION |
发明人 |
FUJII TAKAMICHI;HIRABAYASHI YASUTOSHI |
分类号 |
H01L41/22 |
主分类号 |
H01L41/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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