发明名称 |
Cantilever of scanning probe microscope and method for manufacturing the same, method for inspecting thermal assist type magnetic head device and its apparatus |
摘要 |
To detect both of near-field light and magnetic field generated by a thermal assist type magnetic head and to perform inspection of the head, a cantilever of a scanning probe microscope has a lever in which a probe is formed, a thin magnetic film formed on a surface of the probe, and fine particles or thin film of noble metal or an alloy including noble metal formed on a surface of the magnetic film. An inspection apparatus has the cantilever, a displacement detection unit to detect vibration of the cantilever, a near-field light detection unit to detect scattered light caused by near-field light generated from a near-field light emitter and enhanced on the surface of the probe of the cantilever, and a processing unit to process signals obtained by detection with the displacement detection unit and the near-field light detection unit. |
申请公布号 |
US8713710(B2) |
申请公布日期 |
2014.04.29 |
申请号 |
US201213650985 |
申请日期 |
2012.10.12 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
ZHANG KAIFENG;HIROSE TAKENORI;WATANABE MASAHIRO;NAKAGOMI TSUNEO;HONMA SHINJI;TOKUTOMI TERUAKI;NAKATA TOSHIHIKO;TATIZAKI TAKEHIRO |
分类号 |
G01Q60/56;G01Q60/06;G01Q60/50 |
主分类号 |
G01Q60/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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