Adaptive deformable mirror for compensation of defects of a wavefront

摘要

An adaptive mirror that includes a substrate layer, on the first surface of which a reflecting layer and on the second surface of which at least one actuator is disposed. The substrate layer has a thickness of less than or equal to 1,000μm and the mirror having at least one further metallization for thermal compensation, as a result of which a thermal deformation of the mirror is avoided or preadjusted such that the desired curvature is set as a function of the reflected power.