发明名称 Area efficient through-hole connections
摘要 Using printing technologies to fill conductor materials into holes in silicon substrate, the preferred embodiments of the present improve cost efficiency of through-hole connections. Using silicon substrate as cathode terminal during electrical plating that fill holes in a silicon substrate with conductors, the preferred embodiments of the present improve alignment accuracy and cost efficiency of through-hole manufacturing processes.
申请公布号 US8709945(B2) 申请公布日期 2014.04.29
申请号 US201213413561 申请日期 2012.03.06
申请人 SHAU JENG-JYE 发明人 SHAU JENG-JYE
分类号 H01L21/44;H01L21/768;H01L23/48;H01L29/40;H01R43/16 主分类号 H01L21/44
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