发明名称 Method for conductivity control of (Al,In,Ga,B)N
摘要 A method of controlled p-type conductivity in (Al,In,Ga,B)N semiconductor crystals. Examples include {10 11} GaN films deposited on {100} MgAl2O4 spinel substrate miscut in the <011> direction. Mg atoms may be intentionally incorporated in the growing semipolar nitride thin film to introduce available electronic states in the band structure of the semiconductor crystal, resulting in p-type conductivity. Other impurity atoms, such as Zn or C, which result in a similar introduction of suitable electronic states, may also be used.
申请公布号 US8709925(B2) 申请公布日期 2014.04.29
申请号 US201213440234 申请日期 2012.04.05
申请人 KAEDING JOHN F.;SATO HITOSHI;IZA MICHAEL;ASAMIZU HIROKUNI;ZHONG HONG;DENBAARS STEVEN P.;NAKAMURA SHUJI;THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 KAEDING JOHN F.;SATO HITOSHI;IZA MICHAEL;ASAMIZU HIROKUNI;ZHONG HONG;DENBAARS STEVEN P.;NAKAMURA SHUJI
分类号 H01L21/04 主分类号 H01L21/04
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