| 发明名称 |
MEMS structure and method for making the same |
| 摘要 |
A micro electro mechanical system (MEMS) structure is disclosed. The MEMS structure includes a backplate electrode and a 3D diaphragm electrode. The 3D diaphragm electrode has a composite structure so that a dielectric is disposed between two metal layers. The 3D diaphragm electrode is adjacent to the backplate electrode to form a variable capacitor together. |
| 申请公布号 |
US8710601(B2) |
申请公布日期 |
2014.04.29 |
| 申请号 |
US20090621526 |
申请日期 |
2009.11.19 |
| 申请人 |
HUANG CHIEN-HSIN;LAN BANG-CHIANG;WANG MING-I;WU HUI-MIN;SU TZUNG-I;SU CHAO-AN;TAN TZUNG-HAN;CHEN MIN;LIN MENG-JIA;UNITED MICROELECTRONICS CORP. |
发明人 |
HUANG CHIEN-HSIN;LAN BANG-CHIANG;WANG MING-I;WU HUI-MIN;SU TZUNG-I;SU CHAO-AN;TAN TZUNG-HAN;CHEN MIN;LIN MENG-JIA |
| 分类号 |
H01L29/84 |
主分类号 |
H01L29/84 |
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