发明名称 DRIVING DEVICE FOR VACUUM GATE VALVE
摘要 <p>The present invention relates to a driving device for a vacuum gate valve that open and closes the gates formed on the front and rear surfaces of the vacuum gate valve by means of a pair of gate plates by using rotating forces of gears and magnetic forces of magnets and maintains the vacuum state of the vacuum gate valve in an air tight state. Accordingly, the driving device includes: a valve body having first and second gates; a valve plate assembly having first and second gate plates, first and second support plates, a base, a support frame, a plurality of link members, and a plurality of elastic members; upward and downward movement units each having a moving cylinder reciprocating the valve plate assembly upward and downward and a cylinder rod; left and right movement units mounted at one side portions of the first and second support plates to reciprocate the first and second support plates in left and right directions; and plate moving units disposed on the first and second support plates and the first and second gate plates so that while the first and second support plates are being moved in left and right directions by means of the left and right movement units, the plate moving units move the first and second gate plates to the first and second support plates.</p>
申请公布号 KR101389767(B1) 申请公布日期 2014.04.29
申请号 KR20130058876 申请日期 2013.05.24
申请人 SWP CO., LTD. 发明人 SONG, JAE HWA
分类号 F16K51/02;F16K3/18;H01L21/02 主分类号 F16K51/02
代理机构 代理人
主权项
地址