TARGET FOR FORMING LITHIUM-COTANING THIN FILM FOR THIN FILM BETTERY AND PREPARING METHOD OF THE SAME

摘要

PURPOSE: A target for forming a lithium-containing thin film is provided to manufacture a target for manufacturing a thin film satisfying stoichiometry even in case lithium is lost during post process like sintering and vacuum evaporation. CONSTITUTION: A target for forming a lithium-containing thin film comprises: a step(S10) of forming a raw material containing excessive lithium by adding lithium-containing material into lithium-containing or lithium-non containing raw material powder satisfying stoichiometry; a step(S20) of primary heat-treating the raw material powder containing excessive lithium; a step(S30) of manufacturing a mold by pressurizing and molding the raw material containing the pulverized excessive lithium; and a step(S50) of secondary heat-treating the mold. [Reference numerals] (S10) Forming raw materail containing excessive lithium; (S20) First heat-treating the raw material; (S30) Pulverizing the raw material; (S40) Manufacturing a molded product by pressurizing and molding the raw material; (S50) Manufacturing a target for manufacturing a thin film by second heat-treating the molde product; (S60) Forming a thin film by evaporating the target