| 摘要 |
An Illumination optical apparatus that substantially maintains a desirable profile even when changing the outer shape of light intensity distribution formed on an illumination pupil plane with an axicon system. The illumination optical system illuminates an irradiated surface (M) based on light from an optical source (1) and includes a prism system, which changes the interval along an optical axis (AX) between a pair of prisms (6a, 6b) to change the light intensity distribution on an illumination pupil plane (8a). |
