发明名称 |
METHODS AND APPARATUS FOR CLEANING FLIP CHIP ASSEMBLIES |
摘要 |
<p>An apparatus for cleaning flip chip assemblies is provided. The apparatus comprises: a chuck assembly; a motor coupled to the chuck assembly by a spindle; at least one carrier for holding flip chips; at least one spray nozzle for directing DIW, a cleaning solution, a gas or a vapor. Apparatus of the invention further provides a method for cleaning flip chip assemblies. The method comprises: loading at least one flip chip to the flip chip carriers; rotating the chuck assembly at a rotation speed; flowing DIW for rinsing the flip chips; flowing a cleaning solution for removing the contaminants; applying ultrasonic/megasonic energy to the flip chips; blowing a gas or a vapor via the spray nozzles for drying the flip chips; bringing the flip chips out of the flip chip carriers.</p> |
申请公布号 |
SG11201400619Q(A) |
申请公布日期 |
2014.04.28 |
申请号 |
SG11201400619Q |
申请日期 |
2011.09.22 |
申请人 |
ACM RESEARCH (SHANGHAI) INC. |
发明人 |
ZHANG, XIAOYAN;CHEN, FUPING;WANG, HUI |
分类号 |
H01L21/67;H01L21/687 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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