发明名称 ELECTROMAGNETIC ACTUATOR, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS
摘要 An electromagnetic actuator (300) includes a first and second magnetic members (310,320) that are displaceable relative to each other and are arranged to provide a magnetic circuit; and a coil (340.1, 340.2) configured to, in use, receive a current to generate a magnetic flux through the magnetic circuit, thereby generating a force between the first and second magnetic members in a first direction (Y), the magnetic flux, in use, being transferred between the first and second magnetic members through a first surface (312) of the first magnetic member and a second surface (322) of the second magnetic member, the first and second surface being separated by an airgap (390), wherein the first surface and the second surface are arranged relative to each other such that an outer dimension (L1) of the first surface extends beyond an outer dimension (L2) of the second surface in a second direction substantially perpendicular to the first direction.
申请公布号 KR101389384(B1) 申请公布日期 2014.04.25
申请号 KR20120017443 申请日期 2012.02.21
申请人 发明人
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
代理机构 代理人
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