发明名称 SOLID-STATE IMAGING DEVICE AND METHOD OF MANUFACTURING SOLID-STATE IMAGING DEVICE
摘要 According to one embodiment, a solid-state imaging device includes a photoelectric conversion element, a fixed charge layer, a silicon nitride film, and a silicon oxide film. The photoelectric conversion element performs photoelectric conversion of converting incident light into the amount of charges corresponding to the amount of received light, and accumulates the charges. The fixed charge layer is formed on a light receiving surface side of the photoelectric conversion element, and holds negative fixed charges. The silicon nitride film is formed on a light receiving surface side of the fixed charge layer. The silicon oxide film is formed between the fixed charge layer and the silicon nitride film.
申请公布号 US2014110806(A1) 申请公布日期 2014.04.24
申请号 US201313867309 申请日期 2013.04.22
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 WATANABE RYOTA;UYA SHINJI
分类号 H01L31/0232;H01L31/18 主分类号 H01L31/0232
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