| 摘要 |
<p>Orienter chambers for determining the orientation of a substrate in a substrate processing system are provided. In some embodiments, an orienter chamber includes a housing enclosing an interior volume; a rotatable stage disposed inside the housing including a substrate support surface adapted to support a substrate; a light source disposed above the stage and positioned to provide illuminating light to the outer circumference of a substrate when the substrate is loaded on the rotatable stage, wherein the illuminating light from the light source is inclined toward the center of the substrate by an angle from a vertical line that extends perpendicular to the substrate support surface; a light-receiving unit having a light-receiving surface on which are arranged a plurality of light-receiving elements that receive the illuminating light from the light source; and an analysis unit that analyzes the illuminating light received by the light-receiving elements.</p> |
