发明名称
摘要 A layer of a nitride of silicon is provided over at least that part of the surface of a semi-conductor body where a P-N junction emerges. The layer is provided by deposition from a gaseous atmosphere comprising a mixture of nitrogen and hydrogen bubbled through silicon tetrachloride, or a mixture of a silicon hydride with a nitrogen hydride or a halogen compound of ammonia, or disilylamine. Hydrogen or nert gas may be used as a carrier, and deposition may be effected by heating the semi-conductor body or by means of an R.F.-initiated electric discharge.
申请公布号 BE647620(A) 申请公布日期 1964.11.09
申请号 BED647620 申请日期 1964.05.08
申请人 发明人
分类号 C23C16/34;C23C16/50;H01L21/00;H01L21/316;H01L21/318;H01L23/29;H01L29/00;H01L29/06 主分类号 C23C16/34
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