发明名称 PRODUCTION METHOD OF PROTECTIVE FILM
摘要 PROBLEM TO BE SOLVED: To provide a method for producing a protective film having a superior flattening degree on a rugged substrate.SOLUTION: The method for producing a protective film includes the steps of: applying a photosensitive resin composition comprising a polymer (A), a (meth)acryl compound (B), a polymerization initiator (C) and a solvent (E) on a rugged substrate to form a coating film; exposing the coating film formed in a recessed portion to light through a mask; and exposing the entire surface of the coating film to light. The step of exposing the entire surface of the coating film is carried out subsequently to the step of exposing the coating film formed in a recessed portion to light through a mask.
申请公布号 JP2014074787(A) 申请公布日期 2014.04.24
申请号 JP20120221924 申请日期 2012.10.04
申请人 SUMITOMO CHEMICAL CO LTD 发明人 SHIRAKAWA MASAKAZU
分类号 G02B5/20;C08G59/20;G02F1/1335;G03F7/038;G03F7/38;H01L21/027 主分类号 G02B5/20
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