HARD COATING LAYER AND METHOD FOR FORMING THE SAME

摘要

Disclosed is a method of forming a hard coating layer on a substrate. The method is to form the hard coating layer on the substrate by vaporizing a TiAl alloy using an arc source in an atmosphere where inert gas and reactive gas are mixed in a vacuum chamber. The method for forming the hard coating layer according to the present invention includes forming an adhesive layer composed of metal components on the substrate, forming a TiAlN coating layer by injecting nitrogen gas into the vacuum chamber; and forming a first layer with a higher flow rate than that of a second layer by controlling the flow rate of injected nitrogen in two stages.