| 摘要 |
PROBLEM TO BE SOLVED: To effectively heat a free air ball with a compact structure in an antioxidation gas blower unit attached to a wire bonding device.SOLUTION: An antioxidation gas blower unit includes: a base part 20 having a hollow plate shape and in which an antioxidation gas passage 30 is formed; a hole 24 which is provided at the base part 20 so that a capillary 12 is inserted thereinto or removed therefrom and communicates with the antioxidation gas passage 30; and a heater 50 attached to an outer surface of the base part 20. The antioxidation gas passage 30 includes a first passage provided on a portion of the base part 20 which is located near the outer surface on which the heater 50 is attached. |
