发明名称 INSPECTION EQUIPMENT FOR OPTICAL ELEMENT AND INSPECTION METHOD FOR OPTICAL ELEMENT
摘要 PROBLEM TO BE SOLVED: To directly and speedily inspect optical characteristics of an optical element in which two types of polar screens with polarization directions perpendicular to each other are two-dimensionally arranged.SOLUTION: An inspection method is for a mixed type filter 10 in which a first polarization region for transmitting a first polarization component of incident light and a second polarization region for transmitting a second polarization component of the incident light are two-dimensionally arranged. An angle of an analyzer 123 arranged on a subsequent stage of the mixed type filter is set as 45 degrees. According to a transmission light intensity of inspection light detected while rotating a polarizer 117 arranged on a preceding stage of the mixed type filter by every predetermined angle, a TM transmission rate and a TE transmission rate of the mixed type filter are calculated.
申请公布号 JP2014074650(A) 申请公布日期 2014.04.24
申请号 JP20120222165 申请日期 2012.10.04
申请人 RICOH CO LTD 发明人 MORI TETSUJI;SANNOMIYA TAKASHI
分类号 G01M11/00;G02B5/30 主分类号 G01M11/00
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