摘要 |
PROBLEM TO BE SOLVED: To directly and speedily inspect optical characteristics of an optical element in which two types of polar screens with polarization directions perpendicular to each other are two-dimensionally arranged.SOLUTION: An inspection method is for a mixed type filter 10 in which a first polarization region for transmitting a first polarization component of incident light and a second polarization region for transmitting a second polarization component of the incident light are two-dimensionally arranged. An angle of an analyzer 123 arranged on a subsequent stage of the mixed type filter is set as 45 degrees. According to a transmission light intensity of inspection light detected while rotating a polarizer 117 arranged on a preceding stage of the mixed type filter by every predetermined angle, a TM transmission rate and a TE transmission rate of the mixed type filter are calculated. |