MATCHING DEVICE AND METHOD OF CONTROLLING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a matching device capable of performing precise impedance matching.SOLUTION: An EH tuner 10 which adjusts the impedance of a transmission line between a signal source (microwave generation part 1) and a load 3 includes: an E-branch tube 15 which is connected to an E surface of a waveguide connecting the signal source and the load to each other; an E plunger 16 which is provided in the E-branch tube and arranged movably along the tube axis; an H-branch tube 12 which is connected to an H surface of the waveguide; an H plunger 13 which is provided in the H-branch tube and arranged movably along the tube axis; selecting means (control part 20) which finds two combinations of E plunger positions and H plunger positions where impedance matching between the signal source and load is obtained, and selects a combination for a wider matching region between the two found combinations; and moving means (actuators 17, 18) of moving the E plunger and H plunger according to the selected combination.