摘要 |
<p>This thin-film formation device, which forms a thin film on the surface of a substrate, is provided with the following: a supply unit that supplies, to the surface of the substrate, droplets of a solvent that contains a material that forms the thin film; a shape-changing unit that changes the shapes of the droplets on the surface of the substrate so as to extend from one direction to another direction; and a removal unit that removes the solvent from the droplets extending from the aforementioned one direction to the aforementioned other direction.</p> |