发明名称 THIN-FILM FORMATION DEVICE AND THIN-FILM FORMATION METHOD
摘要 <p>This thin-film formation device, which forms a thin film on the surface of a substrate, is provided with the following: a supply unit that supplies, to the surface of the substrate, droplets of a solvent that contains a material that forms the thin film; a shape-changing unit that changes the shapes of the droplets on the surface of the substrate so as to extend from one direction to another direction; and a removal unit that removes the solvent from the droplets extending from the aforementioned one direction to the aforementioned other direction.</p>
申请公布号 WO2014061451(A1) 申请公布日期 2014.04.24
申请号 WO2013JP76813 申请日期 2013.10.02
申请人 NIKON CORPORATION 发明人 MIYAJI AKIRA;NARA KEI;KOIZUMI SHOHEI;MIYAMOTO KENJI
分类号 H01L21/368;B05D3/12;G02F1/13;H01L21/336;H01L29/786;H01L51/50;H05B33/10 主分类号 H01L21/368
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