| 摘要 |
A polishing liquid composition includes composite oxide particles containing cerium and zirconium, a dispersing agent, and an aqueous medium. A powder X-ray diffraction spectrum of the composite oxide particles obtained by CuK±1 ray (» = 0.154050 nm) irradiation includes a peak (first peak) having a peak top in a diffraction angle 2¸ (¸ is a Bragg angle) range of 28.61 to 29.67°, a peak (second peak) having a peak top in a diffraction angle 2¸ range of 33.14 to 34.53°, a peak (third peak) having a peak top in a dim-action angle 2¸ range of 47.57 to 49.63°, and a peak (fourth peak) having a peak top in a diffraction angle 2¸ range of 56.45 to 58.91°. A half-width of the first peak is 0.8° or less. |
