| 摘要 |
The present invention relates to an apparatus and a method to detect a non-contact temperature through a pyrometer, and a substrate processing apparatus using the temperature detecting apparatus and, more specifically, to a temperature detecting apparatus, a temperature detecting method, and a substrate processing apparatus using the same, which are capable of correcting a temperature to measure an accurate temperature without being affected by humidity. An embodiment of the present invention includes: a humidity sensor to measure humidity; a temperature correction database to store a temperature correction value according to the humidity; and a pyrometer to calculate a non-contact temperature by adding a temperature correction value corresponding to the humidity, measured by the humidity sensor, to a temperature to be corrected that is calculated by measuring the wavelength strength of a wavelength band to be corrected that is irradiated from an object, when the wavelength band consisting of the transmittance retardation wavelength band which is a wavelength band with transmittance less than a first threshold by humidity and transmittance passage wavelength band which is wavelength band with transmittance greater than a second threshold by humidity is defined as the wavelength band to be corrected. [Reference numerals] (AA) Start; (BB) End; (S710) Create a temperature adjustment database; (S720) Calculate a temperature to be corrected; (S730) Measure humidity; (S740) Calculate a temperature correction value according to the humidity; (S750) Correct the temperature to be corrected with the temperature correction value |
