发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
摘要 A semiconductor device disclosed in the present description is provided with a semiconductor substrate, and a plurality of trench gates, which extend in the first direction, and which are disposed in the second direction at intervals, said second direction being orthogonal to the first direction. Each of the trench gates has: a first portion opened in the front surface of the semiconductor substrate; a second portion that is extending in the direction tilted to the positive direction of the second direction with respect to the depth direction of the semiconductor substrate, said second portion extending from the first portion; and a third portion that is extending in the direction tilted to the negative direction of the second direction with respect to the depth direction of the semiconductor substrate, said third portion extending from the first portion.
申请公布号 WO2014061075(A1) 申请公布日期 2014.04.24
申请号 WO2012JP76599 申请日期 2012.10.15
申请人 TOYOTA JIDOSHA KABUSHIKI KAISHA;KUROKAWA YUTO 发明人 KUROKAWA YUTO
分类号 H01L29/78;H01L21/336;H01L29/739 主分类号 H01L29/78
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