发明名称 VALVE
摘要 A valve includes a gate and an actuator. The gate has a gate opening with a first seal fixed to the gate and positioned along a periphery of the gate opening. The gate also has a blocking portion with a second seal fixed to the gate and positioned along a periphery of the blocking portion. The actuator is configured to move the gate between an open position and a closed position, wherein the gate opening is aligned to a chamber opening in a chamber wall and the first seal engages a sealing surface of the chamber wall in the open position and wherein the blocking portion is aligned to the opening in the chamber wall and the second seal engages the sealing surface of the chamber wall in the closed position. The valve is capable of operating in harsh environments.
申请公布号 US2014110619(A1) 申请公布日期 2014.04.24
申请号 US201213655902 申请日期 2012.10.19
申请人 BORICHEVSKY STEVEN C.;BETTENCOURT ROBERT H.;VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 BORICHEVSKY STEVEN C.;BETTENCOURT ROBERT H.
分类号 F16K3/02 主分类号 F16K3/02
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