发明名称 METHOD FOR SEPARATING A LAYER FROM A COMPOSITE STRUCTURE
摘要 <p>The invention relates to a method for separating a layer (115) from a composite structure (125), the structure comprising a composite stack formed from at least a support substrate (105) which is partially transparent at a determined wavelength, the layer (115) to be separated and a separation layer (110) interposed between the support substrate and the layer to be separated, the method comprising irradiation of the separation layer (110) through the support substrate (105) by means of incident light ray (124a) at the determined wavelength in order to induce weakening or separation by exfoliation of the separation layer, the light ray being inclined so as to form an angle of incidenceΘsuch thatθ>θmin, whereθmin = sin -1((n1/no)sin(tan-1(S/2h))), n1 and n0 respectively being the refractive index of the support substrate and the refractive index of the external medium (130) in contact with the support substrate (105), from which the said ray comes, S being the width of the said ray and h being the thickness of the support substrate.</p>
申请公布号 WO2013011372(A8) 申请公布日期 2014.04.24
申请号 WO2012IB01406 申请日期 2012.07.18
申请人 SOITEC;LANDRU, DIDIER 发明人 LANDRU, DIDIER
分类号 H01L21/762 主分类号 H01L21/762
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