| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus which can highly efficiently perform laser beam machining by eliminating debris generated during laser beam machining.SOLUTION: Pulsed light oscillated by a laser oscillator 3 is condensed by a condenser lens 5 to a workpiece. A pair of electrodes 6, 7 supply an optical path L between the condenser lens 5 and the workpiece 2 with explosion energy due to spark and eliminates debris generated from the workpiece 2 during laser beam machining from the optical path L. Thus, the workpiece 2 is irradiated with the pulsed light which is oscillated by the laser oscillator 3 and is not absorbed by the debris. |
