发明名称 ETCHING METHOD
摘要 In this etching method, the surface (11a) of a target object (11) is processed by using a corrosive agent to corrode said surface (11a) as a means of solving the problem addressed by the present invention. The etching method comprises: a resist formation step in which resist liquid is inkjet-printed on the surface (11a) so that the resist liquid forms a resist (12); a surface corrosion step in which the side (11a) of the target object (11) on which the resist (12) was formed by the resist formation step is brought into contact with a corrosive agent so that the part of the surface (11a) not having the resist (12) formed thereon is corroded; and a resist peeling step in which the resist (12) is peeled from the surface (11a) after the surface corrosion step. The etching method is characterized by the resist formation step being a step in which the resist (12) is formed using a resist liquid containing a monofunctional monomer or a monofunctional oligomer and a polyfunctional monomer or a polyfunctional oligomer.
申请公布号 WO2014061522(A1) 申请公布日期 2014.04.24
申请号 WO2013JP77448 申请日期 2013.10.09
申请人 MIMAKI ENGINEERING CO., LTD. 发明人 NAKAMURA, NORIKAZU
分类号 C23F1/00;B05D3/10;H01L21/027;H05K3/06 主分类号 C23F1/00
代理机构 代理人
主权项
地址