ORGANIC AMINOSILANE PRECURSOR, PROCESS FOR MANUFACTURING THE PRECURSOR, AND METHOD FOR USING THE PRECURSOR

摘要

PROBLEM TO BE SOLVED: To provide an organic aminosilane precursor to be used for the deposition of silicon-containing films.SOLUTION: Disclosed are organic aminosilane precursors to be used for the deposition of silicon containing films containing silicon, and a method for manufacturing those precursors. Also disclosed is a deposition method for manufacturing a silicon-containing film by using the organic aminosilane precursors described herein. Also disclosed are the aforementioned organic aminosilane precursors or the containers containing the composites, which can be used to supply the precursors to a reactor so as to deposit the silicon-containing film.