发明名称 PHOTOSENSITIVE ELEMENT, METHOD FOR FORMING RESIST PATTERN USING THE SAME, AND METHOD FOR MANUFACTURING PRINTED WIRING BOARD
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive element having a support film, in which flaws generating in the support film can be sufficiently suppressed, and to provide a method for forming a resist pattern and a method for manufacturing a printed wiring board using the photosensitive element.SOLUTION: The photosensitive element includes a support film 10 and a layer 20 made of a photosensitive resin composition formed on the support film 10; and the photosensitive element further includes a self-healing layer or a hard coat layer on a surface of the supporting film 10 not in contact with the layer 20 made of the photosensitive resin composition. The layer made of the photosensitive resin composition comprises (A) a binder polymer, (B) a photopolymerizable compound having an ethylenically unsaturated bond, and (C) a photopolymerization initiator.
申请公布号 JP2014074764(A) 申请公布日期 2014.04.24
申请号 JP20120221239 申请日期 2012.10.03
申请人 HITACHI CHEMICAL CO LTD 发明人 KUBOTA MASAO
分类号 G03F7/004;G03F7/40;H05K3/06;H05K3/18 主分类号 G03F7/004
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